Resistivity monitoring of the early stages of W CVD nucleation for sub-45 nm process
| Autor: | Haimson, S., Shacham-Diamand, Y., Horvitz, D., Rozenblat, A. |
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| Zdroj: | In Microelectronic Engineering April 2012 92:134-136 |
| Databáze: | ScienceDirect |
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