Fractals and device performance variability: The key role of roughness in micro and nanofabrication
| Autor: | Constantoudis, V., Patsis, G.P., Gogolides, E. |
|---|---|
| Zdroj: | In Microelectronic Engineering February 2012 90:121-125 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect