Improved EOT and leakage current for metal–insulator–metal capacitor stacks with rutile TiO 2
| Autor: | Popovici, Mihaela, Kim, Min-Soo, Tomida, Kazuyuki, Swerts, Johan, Tielens, Hilde, Moussa, Alain, Richard, Olivier, Bender, Hugo, Franquet, Alexis, Conard, Thierry, Altimime, Laith, Elshocht, Sven Van, Kittl, Jorge A. |
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| Zdroj: | In Microelectronic Engineering 2011 88(7):1517-1520 |
| Databáze: | ScienceDirect |
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