Single SrTiO 3 and Al 2O 3/SrTiO 3/Al 2O 3 based MIM capacitors: Impact of the bottom electrode material
| Autor: | Baristiran Kaynak, C., Lukosius, M., Tillack, B., Wenger, Ch., Blomberg, T., Ruhl, G. |
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| Zdroj: | In Microelectronic Engineering 2011 88(7):1521-1524 |
| Databáze: | ScienceDirect |
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