Etching titanium nitride gate stacked on high-κ dielectric
| Autor: | Gerharz, J.C., Padmaraju, K., Moers, J., Grützmacher, D. |
|---|---|
| Zdroj: | In Microelectronic Engineering August 2011 88(8):2541-2543 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Gerharz, J.C., Padmaraju, K., Moers, J., Grützmacher, D. |
|---|---|
| Zdroj: | In Microelectronic Engineering August 2011 88(8):2541-2543 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect