Mechanistic study of lift-off for continuous metal layers after T-NIL
| Autor: | Mayer, Andre, Möllenbeck, Saskia, Dhima, Khalid, Wang, Si, Scheer, Hella-Christin |
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| Zdroj: | In Microelectronic Engineering August 2011 88(8):2056-2058 |
| Databáze: | ScienceDirect |
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