Hybrid working stamps for high speed roll-to-roll nanoreplication with molded sol–gel relief on a metal backbone
| Autor: | Schleunitz, Arne, Spreu, Christian, Mäkelä, Tapio, Haatainen, Tomi, Klukowska, Anna, Schift, Helmut |
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| Zdroj: | In Microelectronic Engineering August 2011 88(8):2113-2116 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect