Influence of silicon orientation and cantilever undercut on the determination of the Young’s modulus of thin films
| Autor: | Nazeer, H., Woldering, L.A., Abelmann, L., Nguyen, M.D., Rijnders, G., Elwenspoek, M.C. |
|---|---|
| Zdroj: | In Microelectronic Engineering August 2011 88(8):2345-2348 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect