Comparison of quartz and silicon as a master mold substrate for patterned media UV-NIL replica process
| Autor: | Hoga, Morihisa, Itoh, Kimio, Ishikawa, Mikio, Kuwahara, Naoko, Fukuda, Masaharu, Toyama, Nobuhito, Kurokawa, Syuhei, Doi, Toshiro |
|---|---|
| Zdroj: | In Microelectronic Engineering August 2011 88(8):1975-1977 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect