Fine control of critical dimension for the fabrication of large bandgap high frequency photonic and phononic crystals
| Autor: | Cuffe, J., Dudek, D., Kehagias, N., Chapuis, P.-O., Reboud, V., Alsina, F., McInerney, J.G., Sotomayor Torres, C.M. |
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| Zdroj: | In Microelectronic Engineering August 2011 88(8):2233-2235 |
| Databáze: | ScienceDirect |
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