Ionic liquid ion sources as a unique and versatile option in FIB applications
| Autor: | Perez-Martinez, Carla, Guilet, Stéphane, Gierak, Jacques, Lozano, Paulo |
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| Zdroj: | In Microelectronic Engineering August 2011 88(8):2088-2091 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect