High volume nanoimprint lithography on III/V substrates: Imprint fidelity and stamp lifetime
| Autor: | Eriksson, Torbjörn, Yamada, Shoko, Venkatesh Krishnan, Prasanna, Ramasamy, Sankar, Heidari, Babak |
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| Zdroj: | In Microelectronic Engineering March 2011 88(3):293-299 |
| Databáze: | ScienceDirect |
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