Investigations of thermal annealing effects on electrical and structural properties of SrTaO based MIM capacitor
| Autor: | Kaynak, C. Baristiran, Lukosius, M., Costina, I., Tillack, B., Wenger, Ch., Ruhl, G., Rushworth, S. |
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| Zdroj: | In Microelectronic Engineering 2010 87(12):2561-2564 |
| Databáze: | ScienceDirect |
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