Electrical characterization and morphological properties of AlN films prepared by dc reactive magnetron sputtering
| Autor: | Moreira, M.A., Doi, I., Souza, J.F., Diniz, J.A. |
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| Zdroj: | In Microelectronic Engineering 2011 88(5):802-806 |
| Databáze: | ScienceDirect |
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