Young’s modulus evaluation by SAWs for porous silica low- k film with cesium doping

Autor: Xiao, X., Shan, X.M., Kayaba, Y., Kohmura, K., Tanaka, H., Kikkawa, T.
Zdroj: In Microelectronic Engineering 2011 88(5):666-670
Databáze: ScienceDirect
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