Phase formation and texture of nickel silicides on Si 1−xC x epilayers
| Autor: | De Keyser, K., De Schutter, B., Detavernier, C., Machkaoutsan, V., Bauer, M., Thomas, S.G., Jordan Sweet, J., Lavoie, C. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2011 88(5):536-540 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect