The effect of pulsed laser annealing on the nickel silicide formation
| Autor: | Chen, Hou-Yu, Lin, Chia-Yi, Huang, Chien-Chao, Chien, Chao-Hsin |
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| Zdroj: | In Microelectronic Engineering 2010 87(12):2540-2543 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Chen, Hou-Yu, Lin, Chia-Yi, Huang, Chien-Chao, Chien, Chao-Hsin |
|---|---|
| Zdroj: | In Microelectronic Engineering 2010 87(12):2540-2543 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect