Soft-lithographic methods for the fabrication of dielectrophoretic devices using molds by proton beam writing
| Autor: | Shiine, Y., Nishikawa, H., Furuta, Y., Kanamitsu, K., Satoh, T., Ishii, Y., Kamiya, T., Nakao, R., Uchida, S. |
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| Zdroj: | In Microelectronic Engineering 2010 87(5):835-838 |
| Databáze: | ScienceDirect |
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