Sub-micron imaging on high-topography wafers using spray coating and projection lithography
| Autor: | Maury, Pascale, Quemper, Jean-Marie, Pocas, Stephane, Vliet, Dick Van, Noordam, Nico, Berge, Peter ten, Best, Keith |
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| Zdroj: | In Microelectronic Engineering 2010 87(5):904-906 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect