Full wafer microlens replication by UV imprint lithography
| Autor: | Schmitt, H., Rommel, M., Bauer, A.J., Frey, L., Bich, A., Eisner, M., Voelkel, R., Hornung, M. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2010 87(5):1074-1076 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect