Development of compatible wet-clean stripper for integration of CoWP metal cap in Cu/low- k interconnects
| Autor: | Wu, Aiping, Baryschpolec, Eugene, Rao, Madhukar, Schaller, Matthias, Bartsch, Christin, Leppack, Susanne, Ott, Andreas |
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| Zdroj: | In Microelectronic Engineering 2010 87(9):1685-1688 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect