Fabrication and characterization of coaxial scanning near-field optical microscopy cantilever sensors
| Autor: | Salomo, M., Bayer, D., Schaaf, B.R., Aeschlimann, M., Oesterschulze, E. |
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| Zdroj: | In Microelectronic Engineering 2010 87(5):1540-1542 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect