Guided phase separation of polymer blend thin films on ion beam-induced pre-patterned substrates
| Autor: | Karade, Yogesh, Madani-Grasset, Frédéric, Berger, Rüdiger, Csiba, Vojtech, Rommel, Mathias, Dietzel, Andreas |
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| Zdroj: | In Microelectronic Engineering 2010 87(5):1569-1574 |
| Databáze: | ScienceDirect |
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