Carbon nanotube vertical membranes for electrostatically actuated micro-electro-mechanical devices
| Autor: | Arun, A., Acquaviva, D., Fernández-Bolaños, M., Salet, P., Le-Poche, H., Pantigny, P., Idda, T., Ionescu, A.M. |
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| Zdroj: | In Microelectronic Engineering 2010 87(5):1281-1283 |
| Databáze: | ScienceDirect |
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