Determination of local electrostatic forces for EUVL mask chucks
| Autor: | Kalkowski, Gerhard, Peschel, Thomas, Risse, Stefan, Müller, Sandra, Engelstad, Roxann L., Zeuske, Jacob R., Vukkadala, Pradeep |
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| Zdroj: | In Microelectronic Engineering 2010 87(5):1287-1289 |
| Databáze: | ScienceDirect |
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