Silicon nanostencils with integrated support structures
| Autor: | Fostner, Shawn, Burke, Sarah A., Topple, Jessica, Mativetsky, Jeffrey M., Beerens, Jean, Grutter, Peter |
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| Zdroj: | In Microelectronic Engineering 2010 87(4):652-657 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect