Optical proximity correction for a versatile LCD based direct write maskless photoplotter

Autor:	Kessels, M.V., Heggarty, K.
Zdroj:	In Microelectronic Engineering 2009 86(12):2385-2391
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect