Wet releasing and stripping SU-8 structures with a nanoscale sacrificial layer
| Autor: | Wang, Peihong, Tanaka, Katsuhiko, Sugiyama, Susumu, Dai, Xuhan, Zhao, Xiaolin |
|---|---|
| Zdroj: | In Microelectronic Engineering 2009 86(11):2232-2235 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect