Improved manufacturability of ZrO 2 MIM capacitors by process stabilizing HfO 2 addition
| Autor: | Müller, J., Böscke, T.S., Schröder, U., Reinicke, M., Oberbeck, L., Zhou, D., Weinreich, W., Kücher, P., Lemberger, M., Frey, L. |
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| Zdroj: | In Microelectronic Engineering 2009 86(7):1818-1821 |
| Databáze: | ScienceDirect |
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