Point defects in Al 2O 3 and their impact on gate stacks
| Autor: | Weber, J.R., Janotti, A., Van de Walle, C.G. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2009 86(7):1756-1759 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Weber, J.R., Janotti, A., Van de Walle, C.G. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2009 86(7):1756-1759 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect