Effect of heat treatments on electric dipole at metal/high- k dielectric interfaces measured by in situ XPS
| Autor: | Zenkevich, Andrei, Lebedinskii, Yuri, Matveyev, Yuri, Spiga, Sabina, Lamagna, Luca, Fanciulli, Marco |
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| Zdroj: | In Microelectronic Engineering 2009 86(7):1777-1779 |
| Databáze: | ScienceDirect |
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