Sr excess accommodation in ALD grown SrTiO 3 and its impact on the dielectric response
| Autor: | Clima, S., Pourtois, G., Menou, N., Popovici, M., Rothschild, A., Kaczer, B., Van Elshocht, S., Wang, X.P., Swerts, J., Pierreux, D., De Gendt, S., Wouters, D.J., Kittl, J.A. |
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| Zdroj: | In Microelectronic Engineering 2009 86(7):1936-1938 |
| Databáze: | ScienceDirect |
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