Quantitative force and mass measurements using the cantilever with integrated actuator and deflection detector
| Autor: | Woszczyna, M., Zawierucha, P., Świątkowski, M., Gotszalk, T., Grabiec, P., Nikolov, N., Mielczarski, J., Mielczarska, E., Glezos, N., Ivanow, Tzv., Ivanowa, K., Sarov, Y., Rangelow, I.W. |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):1043-1045 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect