Electron beam lithography of hybrid sol–gel negative resist
| Autor: | Della Giustina, G., Prasciolu, M., Brusatin, G., Guglielmi, M., Romanato, F. |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):745-748 |
| Databáze: | ScienceDirect |
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| Autor: | Della Giustina, G., Prasciolu, M., Brusatin, G., Guglielmi, M., Romanato, F. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2009 86(4):745-748 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect