Flash-evaporated TiNiCu thick film for shape memory alloy micro actuator
| Autor: | Mineta, Takashi, Kasai, Kouji, Sasaki, Yuki, Makino, Eiji, Kawashima, Takahiro, Shibata, Takayuki |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):1274-1277 |
| Databáze: | ScienceDirect |
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