Effect of deposition conditions on charging processes in SiN x: Application to RF-MEMS capacitive switches
| Autor: | Daigler, Richard, Papandreou, Eleni, Koutsoureli, Matroni, Papaioannou, George, Papapolymerou, John |
|---|---|
| Zdroj: | In Microelectronic Engineering 2009 86(3):404-407 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect