Low energy ion beam machining of ULE ® substrates: Evaluation of surface roughness
| Autor: | Inaba, Takuro, Kurashima, Yuichi, Pahlovy, Shahjada A., Miyamoto, Iwao, Ando, Manabu, Numata, Atsushi |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):497-499 |
| Databáze: | ScienceDirect |
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