A mass-balanced through-wafer electrostatic x/ y-scanner for probe data storage
| Autor: | Engelen, J.B.C., Rothuizen, H.E., Drechsler, U., Stutz, R., Despont, M., Abelmann, L., Lantz, M.A. |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):1230-1233 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect