Metallization on polymer via quantitatively controlled catalyzation in Sc–CO 2 and electroless plating with Sc–CO 2 emulsion for micro and nano-device
| Autor: | Woo, Byung hoon, Sone, Masato, Akinobu, Shibata, Ishiyama, Chiemi, Masuda, Kaoru, Yamagata, Masahiro, Higo, Yakichi |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):1179-1182 |
| Databáze: | ScienceDirect |
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