Fabrication of a three-dimensional optical vortices phase mask for astronomy by means of electron-beam lithography
| Autor: | Prasciolu, M., Tamburini, F., Anzolin, G., Mari, E., Melli, M., Carpentiero, A., Barbieri, C., Romanato, F. |
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| Zdroj: | In Microelectronic Engineering 2009 86(4):1103-1106 |
| Databáze: | ScienceDirect |
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