Infrared spectroscopy and X-ray diffraction studies on the crystallographic evolution of La 2O 3 films upon annealing
| Autor: | Tsoutsou, D., Scarel, G., Debernardi, A., Capelli, S.C., Volkos, S.N., Lamagna, L., Schamm, S., Coulon, P.E., Fanciulli, M. |
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| Zdroj: | In Microelectronic Engineering 2008 85(12):2411-2413 |
| Databáze: | ScienceDirect |
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