Ionic outgassing from photoacid generators upon irradiation at 13.5 nm
| Autor: | Ho, Grace H., Liu, Chih-Jen, Yen, Chih-Han, Ho, Ming-Hsuan, Wu, Sih-Yu |
|---|---|
| Zdroj: | In Microelectronic Engineering 2008 85(11):2213-2219 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Ho, Grace H., Liu, Chih-Jen, Yen, Chih-Han, Ho, Ming-Hsuan, Wu, Sih-Yu |
|---|---|
| Zdroj: | In Microelectronic Engineering 2008 85(11):2213-2219 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect