Composition and electrical characteristics of Al 2O 3–HfO 2–HfTiO nanolaminates on Si
| Autor: | Mikhelashvili, V., Lahav, A., Brener, R., Eisenstein, G. |
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| Zdroj: | In Microelectronic Engineering 2008 85(7):1545-1548 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Mikhelashvili, V., Lahav, A., Brener, R., Eisenstein, G. |
|---|---|
| Zdroj: | In Microelectronic Engineering 2008 85(7):1545-1548 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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