Measurement of the resonant frequency of nano-scale cantilevers by hard contact readout
| Autor: | Dohn, S., Hansen, O., Boisen, A. |
|---|---|
| Zdroj: | In Microelectronic Engineering May-June 2008 85(5-6):1390-1394 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Dohn, S., Hansen, O., Boisen, A. |
|---|---|
| Zdroj: | In Microelectronic Engineering May-June 2008 85(5-6):1390-1394 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect