Evaporation based micro pump integrated into a scanning force microscope probe
| Autor: | Heuck, F., Hug, T., Akiyama, T., Frederix, P.L.T.M., Engel, A., Meister, A., Heinzelmann, H., de Rooij, N.F., Staufer, U. |
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| Zdroj: | In Microelectronic Engineering May-June 2008 85(5-6):1302-1305 |
| Databáze: | ScienceDirect |
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