High-speed fabrication of large-area nanostructured optical devices
| Autor: | Kurihara, Kazuma a, ⁎, Nakano, Takashi a, Ikeya, Hirofumi b, Ujiie, Mashiko b, Tominaga, Junji a |
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| Zdroj: | In Microelectronic Engineering May-June 2008 85(5-6):1197-1201 |
| Databáze: | ScienceDirect |
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