Determination of stress build-up during nanoimprint process in triangular polymer structures
| Autor: | Fernandez-Cuesta, I., Borrisé, X., Retolaza, A., Merino, S., Mendels, D.-A., Hansen, O., Kristensen, A., Pérez-Murano, F. |
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| Zdroj: | In Microelectronic Engineering May-June 2008 85(5-6):838-841 |
| Databáze: | ScienceDirect |
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