Revised fabrication process for micro-fluxgate-magnetometers: Usage of electrodepositable photoresist
| Autor: | Kirchhoff, Maren R., Güttler, Jens, Waldschik, Andreas, Feldmann, Marco, Büttgenbach, Stephanus |
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| Zdroj: | In Microelectronic Engineering May-June 2008 85(5-6):1047-1049 |
| Databáze: | ScienceDirect |
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