Integrated microfluidic–microoptical systems fabricated by dry etching of soda-lime glass
| Autor: | Vieillard, Julien, Mazurczyk, Radoslaw, Boum, Lynda-Lawrence, Bouchard, Aude, Chevolot, Yann, Cremillieu, Pierre, Hannes, Benjamin, Krawczyk, Stanislas |
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| Zdroj: | In Microelectronic Engineering 2008 85(2):465-469 |
| Databáze: | ScienceDirect |
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