Application of group electronegativity concepts to the effective work functions of metal gate electrodes on high- κ gate oxides
| Autor: | Schaeffer, J.K., Gilmer, D.C., Capasso, C., Kalpat, S., Taylor, B., Raymond, M.V., Triyoso, D., Hegde, R., Samavedam, S.B., White, B.E., Jr |
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| Zdroj: | In Microelectronic Engineering 2007 84(9):2196-2200 |
| Databáze: | ScienceDirect |
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